Spinning-current Hall Plate with Integrated Switches

integrated switches Sandra Bellekom, Song Yin and Anton Bakker Delft University of Technology Department of Electrical Engineering, Electronic Instrumentation Laboratory, Mekelweg 4, 2628 CD Delft, The Netherlands Tel. +31 (0)15-278 3342 fax. +31 (0)15-278 5755 [email protected] Abstract|Hall plates are magnetic sensors. Made in a standard IC process they have the advantage of being cheap and small, but they do have the disadvantage of a large and time dependent o set. To reduce the o set, spinning-current Hall plates have been developed. In these multi contact Hall plates, the bias current is switched in di erent directions while the corresponding voltages are measured. The rst step in integrating the electronics necessary to control the spinning-current Hall plate is performed by designing, fabricating and measuring a chip which contains the Hall plate, the switches and the control logic. Preliminary measurement show that this rst step towards a fully integrated low o set magnetic Hall sensor has been successful. Keywords| smart sensor, switches, Hall plate.